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CCQ
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CCQ
Pneumatic Ultra-high Vacuum Gate Valve
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CCQ pneumatic ultra-high vacuum gate valve uses solenoid directional valve to change the direction of air passage, and controls the actuating cylinder to drive the valve disc up and down to make the valve opened or closed. It is used to put through or cut off the air passage in vacuum pipeline. Applicable medium can be pure air and noncorrosive gases.
With signal feedback device.
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Main Technical Performance
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Applicability
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105～1.3×10-7Pa
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Valve Leak Rate
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≤1.3×10-7Pa.L/S.(DN≤200)
≤6.7×10-7Pa.L/S.(DN≥250)
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Applicable Temperature
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-30～+150℃
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The differential pressure between the two sides of valve disc upon valve opening:
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≤2.7×103Pa.
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Annoy pressure
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0.4～0.6MPa
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Materials of Main Parts
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Body, and disc: stainless steel
Sealing element: Viton, bellows(shaft seal), NBR
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CONSTRUCTION FIGHTS(mm)
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Overall and Connection Dimensions(mm)
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Model
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DN
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A
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H
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D
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Do
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D1
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D2
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D3
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L
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L1
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G
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E
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n-d
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Flange Standard
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CCQ-50
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50
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60
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92
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89
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72.4
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61.6
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55.6
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515
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153
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220
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65
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8-M8
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GB6071
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CCQ-63
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63
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65
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105
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114
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92.1
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82.6
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76.6
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566
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180
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220
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80
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8-M8
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CCQ-80
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80
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65
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130
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130
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110
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99
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93
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603
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200
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220
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80
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16-M8
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CCQ-100
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100
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70
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152
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152
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130.2
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120.7
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114.7
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653
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267
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220
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95
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16-M8
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CCQ-150
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150
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70
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202
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202
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181
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171.5
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165.5
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771
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350
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270
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95
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20-M8
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CCQ-200
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200
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80
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251
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253
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231.8
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222.3
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216.6
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889
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424
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270
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115
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24-M8
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CCQ-250
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250
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85
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300
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314
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288
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308
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275
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271
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1127
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574
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350
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140
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24-M10
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JB5278
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CCQ-300
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300
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85
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352
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365
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338
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353
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323
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318
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1197
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613
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420
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140
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32-M10
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CCQ-320
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320
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85
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372
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385
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357
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379
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344
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340
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1197
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613
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440
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140
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36-M10
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JB5278
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CCQ-400
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400
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110
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456
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497
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454
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480
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440
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436
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1666
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810
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536
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180
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36-M12
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CCQ-500
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500
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135
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595
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590
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555
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580
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540
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536
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1835
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870
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640
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220
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40-M12
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CCQ-630
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630
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135
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690
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700
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658
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680
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639
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635
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1930
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960
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780
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280
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40-M16
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CCQ-800
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800
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150
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880
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890
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855
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880
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835
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831
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2200
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1100
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950
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350
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60-M16
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